OXIDE PANEL

Is technology scaling
limited by oxide reliability?

Panel:

• Joe McPherson - Texas Instruments
• David Dumin - Clemson University
• Chenming Hu - UC Berkeley
• Eric Vogel and John Suehle - NIST
• William Abadeer - IBM MicroElectronics
• Bonnie Weir - Lucent Technologies
• Robin Degraeve - IMEC
• Scott A. Hareland - Intel Corporation

  Moderators:
                  William R. Tonti     IBM MicroElectronics
                  Tony Oates           Lucent Bell Labs