Kazuhito Matsukawa received the B.S. (1988) and M.S. (1990) in chemistry from Doshisha University. He joined the Kita-Itami works, Mitsubishi Electric Corp. in 1990. Since 1998, he has been working with ULSI Development Center, Mitsubishi. His research is mainly on the development of the silicon wafer for semiconductor. He is a member of the Japan Society of Applied Physics and the Chemical Society of Japan.