submitted by Andrew J Spencer (andrew.j.spencer@marconi.com)
on Tuesday, April 17, 2001 at 05:54:23
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For Workshop 4 I am particularly interested in the application of failure analysis techniques on 3-5 semiconductor devices including GaAs and InP. Some fundemental siliocn techniques can be difficult to apply, such as Jet Etch where GaAs may be dissolved from the scribeline edges where exposed to decap acids. Gold metallization can be difficult to remove without damage to the semiconductor. Any solutions? Also, is photoemission a meaningful technique for GaAs or InP where normal reverse biassed junctions might emit infrared light?