Alpha Particles In Semiconductor Packaging Materials

In spite of advances in material control, alpha particle contamination remains a key issue in improving device reliability. A review of the most commonly used means of determining materials flux, and a look to what is needed for the future.

Michael D. Tucker

Before starting Alpha Sciences, Michael Tucker served as Vice President for 8 years at Spectrum Sciences in Santa Clara, CA. He has 16 years experience in the semiconductor industry, including ion implantation and clean room automation.