Luigi Pantisano received his MS and PhD degrees in electrical engineering from University of Padova, Padova, Italy, in 1996 and 2000, respectively. In 2000, he was with Bell Laboratories-Lucent Technologies, Murray Hill, NJ, pursuing the impact of plasma-charging damage on RF CMOS devices. Since 2001, Luigi joined IMEC to work on high-k gate dielectrics for CMOS technologies. Luigi has been a committee member of several conferences (SISC, IRPS, IGSAT, ICMTS) and contributed to more than 130 papers in the field of plasma damage, RF measurements, and the reliability and electrical characterization of novel high-k devices.