Announcement:
Program for 2003 International Reliability Physics Symposium
Visit www.irps.org for more details.
Sessions Include:
Circuit / transistor reliability: 12 papers including soft-breakdown and NBTI.
High-K dielectrics: 6 papers on hafnium, zirconium and aluminum oxides.
Ultra-thin gate oxides: 10 papers on devices with sub-1.5nm gate dielectrics.
Copper reliability: 7 papers on copper electromigration and stress migration.
Low-k dielectric reliability: 7 papers on inter-level dielectrics and etch stop layers.
SiGe and Compound Semiconductors: 11 papers.
Soft-error rates and memory: 10 papers.
ESD and Packaging: 13 papers.
Failure analysis: 7 papers.
Product reliability: 7 papers.
MEMS reliability: 5 papers.
Latch-up: 5 papers.
New to IRPS 2003:
Late breaking news: 90nm quadruple gate dielectric circuits for SoC applications
Reliability-year-in-review seminar: review of highlights in Cu/low-k, High-k gates, Non-volatile memories and ESD/EOS.
Virtual IRPS on DVDROM: In case you miss 2003 or a previous year.
Additional Highlights:
-- Tutorial program with topics on: Gate dielectric reliability, copper/low-k, SER.
-- Workshops: Copper/low.
IRPS 2003