91001

by: Schafft, H.A., National Institute of Standards & Technology, Baglee, D.A., Intel Corp., Kennedy, P.E., Managememt Sciences Inc.

title: Building-In Reliability: Making It Work

BIR task force & networks promoting implementation

BIR, core elements

BIR, input parameters categories: intrinsic, extrinsic, & other

BIR, obstacles to

BIR, proactive vs. traditional approach

Integrated Reliability: all phases of manufacture with reliability-driven rules

JEDEC Task Group on Wafer Level Reliability (JC14.2)

Qualified Manufacturers Listing (QML)

91008

by: Hiraka, S., Itabashi, M., Sony Corp.

title: The Influence of Selenium Deposited on Silver Plating on Adhesive Strength of Die-Attachment

Se Ag plating impurity caused die attach failure

Se Ag plating impurity caused epoxy adhesive strength reduction

Se Ag plating impurity caused epoxy resin bleedout

Se Ag plating impurity caused epoxy shear strength reduction

Se rich leadframe plating caused die attach failure

Se rich leadframe plating caused epoxy resin bleedout

Se rich leadframe plating caused sheer strength reduction

Se rich plating surface caused die attach failure

Se rich plating surface caused epoxy adhesive strength reduction

Se rich plating surface caused epoxy resin bleedout

Se rich plating surface caused epoxy sheer strength reduction

91012

by: Shirley, C.G., Hong, C.E.C., Intel Corp.

title: Optimal Acceleration of Cyclic THB Tests for Plastic Packaged Devices

Acceleration model for cyclic THB test

Corrosion reliability model for cyclic THB test

Failure rate model for cyclic THB test

Optimal acceleration in cyclic THB test

Plastic IC acceleration model for cyclic THB test

Plastic IC reliability in cyclic THB test

Plastic defect-caused corrosion in cyclic THB test

Plastic defect-caused corrosion in cyclic THB test

Plastic defect-caused failures in cyclic THB test

Reliability model for cyclic THB test

91022

by: Blish, R.C., Vaney, P.R., Intel Corp.

title: Fail Rate Model for Thin Film Cracking in Plastic ICs

Coffin-Manson model for plastic IC thin film fatique failures

Coffin-Manson model for polysilicon cracking in plastic IC temperature cycling

Coffin-Manson model for thin film cracking in plastic IC temperature cycling

Polysilicon trace cracking temperature cycle plastic IC failure rate model

Thin film cracking temperature cycled plastic IC failure rate model

91030

by: Zelenka, R.L., National Semiconductor

title: A Reliability Model for Interlayer Dielectric Cracking During Temperature Cycling

Interlayer dielectric cracking dependence on molding compound

Interlayer dielectric cracking temperature cycling failure rate model

Interlayer dielectric cracking temperature cycling reliability model

Interlayer dielectric temperature cycle failure dependence on molding compound

91035

by: Harris, D.O.*, Reizman, F.+, Sire, R.A.*, Popelar, C.F.#, Kanninen, C.F.#, Davidson, D.L.#, Duncan, L.B.+, Kallis, J.M.+, Buechler, D.W.+, Backes, P.G.+, *Failure Analysis Assoc., +Hughes Aircraft, #Southwest Research Institute,

title: Fracture Mechanics Life Prediction for Microscale Components, with Application to Wire Bonding

Al wire bond failure rate model based on fracture mechanics

Al wire bond fatique failure reliability prediction model

Al wire bond fracture failure reliability prediction model

Al wire bond power cycle failure rate model based on fracture mechanics

Al wire bond power cycle fatique failure reliability model based on fracture mechanics

91044

by: Mahaney, M., Shell, M.K., Strode, R., Intel Corp.

title: Use of the In-process Bond Shear Test for Predicting Gold Wire Bond Failure Modes in Plastic Packages [BPA]

Ag ball bonding in-process shear testing for failure rate model prediction

Ag ball bonding in-process shear testing for process control

Ag ball bonding in-process shear testing for process development

Ag ball bonding in-process shear testing for reliability prediction

91052

by: Rosenmayer, C.T., Brotzen, F.R., Rice University, McPherson, J.W., Dunn, C.F., Texas Instruments Inc.

title: Effect of Stresses on Electromigration

91057

by: Estabil, J.J., Dorleans, F., Rathore, H.S., IBM

title: The Effect of Metal Thickness on Electromigration-Induced Extrusion Shorts in Submicron Technology

Electromigration, tungsten vias

Electromigration, tungsten vias MTF data from large test matrix

Electromigration, tungsten vias SEM observation of extrusion short

Electromigration, tungsten vias SEM observation of void failure

Electromigration, tungsten vias extrusion failure rate data vs. M1 thickness

Electromigration, tungsten vias importance of interconnect thickness

Electromigration, tungsten vias literature, competing failure modes explained

Electromigration, tungsten vias new interpretation of Black's relation for

Electromigration, tungsten vias selectivity between voids and extrusion shorts

Electromigration, tungsten vias, deconvolving failure modes in lifetime data

Vias tungsten electromigration, behavior of

91064

by: Hemmert, R.S., Costa, M., IBM

title: Electromigration-InducedCompressive Stresses in Encapsulated Thin-Film Conductors

Electromigration, stress gradient, data on time depence of

Electromigration, extrusion suppression due to compressive stress gradient

Electromigration, lifetime, dependence on conductor length

Electromigration, lifetime, improvement due to compressive stress gradient

Electromigration, shape of compress stress gradient caused by

Electromigration, stress gradient, data on characteristic length of

Electromigration, stress gradient, vs. conductor length, data on

Electromigration, test structures, transistor, to measure stress gradient

Electromigration, transistor as stress sensors in

Stress, metallization, caused by accumulation in electromigration

91070

by: Wood, M.H., Bergman, S.C., Hemmert, R.S., IBM

title: Evidence for an Incubation Time in Electromigration Phenomena [OPA]

Electromigration, failure distribution data for contacts

Electromigration, failure distribution data for sandwich metalizations

Electromigration, failure distribution data for vias

Electromigration, failure distribution three-parameter fit

Electromigration, incubation time, distinguished from threshold

Electromigration, incubation time, evidence for in EM-induced failure

Electromigration, incubation time, independence from median time to fail

Electromigration, incubation time, review of arguments for

91077

by: Hosoda, T., Niwa, H., Yagi, H., Tsuchikawa, H., Fujitsu Ltd.

title: Effects of Line Size on Thermal Stress in Aluminum Conductors

Stress, metallization, comparison of measurements and models

Stress, metallization, data on aspect ratio dependence

Stress, metallization, data showing dependence on line width and thickness

Stress, metallization, discrepancies between data and Eshelby inclusion model

Stress, metallization, film stress measurements vs. thickness and temperature

Stress, metallization,suppression of yielding in narrow lines

Stress, metallization,triaxial, x-ray determination of

Stress, voiding accelerated life testing

Stress, voiding accelerated life time, agreement between measurements and diffusional model

Stress, voiding metallization, life time data vs. line width and thickness

X-ray stress, measurements of Al interconnects

91084

by: Yamaji, T., Igarishi, Y., Nishikawa, S., Oki Electric Industry Co., Ltd.

title: Suppression of Migration in Al Conductors by Lowering Deposition Temperature in Plasma CVD SiN Passivation

Electromigration, passivation effects, data on low and high T SiN

Electromigration, role of thermal stress in

Electromigration, suppression by low temperature

Passivation effects, low temperature SiN, thermal stress reduction in Al interconnects

Stress migration, data on non-Arrhenius behavior

Stress migration, elevated-temperature storage test data on failure rates

Stress migration, failure rates, data on power-law linewidth dependence

Stress voiding elevated-temperature storage test data on notch void densities,

Stress voiding hydrogen not a major factor in

Stress voiding passivation effects, data on low and high T SiN

Stress voiding suppression by low-temperature SiN passivation

Stress, metallization, comparison of thermal and passivation stress effects

91091

by: May, J.S., Texas Instruments Inc.

title: Electromigration Characteristics of Vias in Ti:W/Al-Cu(2%) Multilayered Metallization

Electromigration, vias, Al step coverage not a concern

Electromigration, vias, activation energy, dependence on current direction

Electromigration, vias, failure distributions, dependence on current direction

Electromigration, vias, failure mechanism, dependence on current direction

Electromigration, vias, focused ion beam observations of voiding

Electromigration, vias, multilayer metallization

Electromigration, vias, performance comparison with planar test structures

Electromigration, vias, testing, advantages of van der Pauw test structures

Electromigration, vias, voiding at interface

Vias, electromigration, failure mechanisms

91097

by: Kageyama, M., Hashimoto, K., Onoda, H., Oki Electric Industry Co., Ltd.

title: Formation of Texture Controlled Aluminum and its Migration Performance in Al-Si/TiN Stacked Structure

Al metallization, semi-epitaxial (111) growth on TiN

Al metallization, texture control using TiN

Bayer layer, TiN, (111) orientation by rapid thermal nitridation

Bayer layer, TiN, RTN vs. sputtered in EM and stress void resistance

Bayer layer, TiN, role of in preferred orientation of Al interconnects

Electromigration, failure distribution data for oriented Al on TiN

Electromigration, lifetime improvement with Al texture

Stress voiding, elevated-temperature storage test data for Al on TiN

Stress voiding, role of Al texture in increasing

Texture, metallization, X-ray diffraction data for Al on TiN

Texture, metallization, control of Al film crystallographic orientation

91102

by: Lawrence, J.D., McPherson, J.W., Texas Instruments Inc.

title: Corrosion Susceptibility Testing of Al-Cu and Al-Cu-Si Films

Al metallization, native oxide, RBS measurements of

Corrosion, Al/alloy metallization, chlorine-induced

Corrosion, Al/alloy metallization, detrimental effect of Cu

Corrosion, Al/alloy metallization, native oxide, quality vs. alloy

Corrosion, Al/alloy metallization, suppression by Si alloying

Corrosion, Al/alloy metallization, suppression by annealing

Corrosion, Al/alloy metallization, susceptibility vs. Cu content

Corrosion, Al/alloy metallization, test structure for

Corrosion, Al/alloy metallizations, at localized defects in native oxide,

Corrosion, SEM observations of corrosion sites

Corrosion, metallization, failure distributions, data for different alloys

Corrosion, metallization, initiation at grain boundaries and triple points

91107

by: Wang, H., De, H., Lahri, R., National Semiconductor

title: Improving Hot-Electron Reliability Through Circuit Analysis and Design

Circuit design methodology for hot electron reliability

Hot-electron degradation susceptibilities for NMOS/PMOS, AC/DC stress

Hot-electron design guidelines

Hot-electron reliability/performance tradeoffs

Hot-electron stress test structures

91112

by: Rakkhit, R., Yue, J.T., Advanced Micro Devices

title: A Comparison of Inverter-Type Circuit Lifetime and Quasi-Static Analysis of n-MOSFET Lifetime

Hot-electron degradation in ring oscillator circuits; frequency shifts

Hot-electron degradation of inverter circuit lifetime

Limitations of quasi-static analysis of inverter circuit lifetime

MOS transistor/circuit hot electron degradation relationship

Models for hot-electron degradation

Transistor parameter shifts under hot-electron stress

91118

by: Takeda, E., Izawa, R., Umeda, K., Nagai, R., Hitachi Ltd.

title: AC Hot-Carrier Effects in Scaled MOS Devices

AC hot-carrier effects

Device structure dependence of ac hot-carrier effects; Drain engineering

Effect of gate pulse noise on ac hot-carrier degradation

Interrelationship of drain engineering (SD, LDD,GOLD) and hcs mode (CHE, DAHC)

Measurement system wiring inductance effect on ac hcs determination

91123

by: Geissler, S., Adler, E., Bolam, R., IBM

title: A Thermally Activated Gate Current in Off-State p-MOSFETs

Gate induced drain leakage in buried channel PMOSFETs; physical mechanisms

PMOSFET design constraints for hot-carrier reliability

PMOSFET hot-carrier instabilities

Thermally activated gate current in PMOSFETs

Trench isolation effects on hot-carrier phenomena

91129

by: Matsuzaki, N., Watanabe, A., Minami, M., Nagano, T., Hitachi Ltd.

title: Increase Hot-Carrier Degradation of n-MOSFETs under Very Fast Transient Stressing

AC and DC hot-carrier stress relationship

Fast (sub-nanosecond) transient stress of NMOSFETs

On-chip signal generator for ac testing of hot-carrier effects

Oxide trap creation during hot-carrier stress

Shortcoming of quasi-static model for ac lifetime estimation

91133

by: Brox, M., Weber, W., Siemens AG

title: Proof and Quantification of Dynamic Effects in Hot-Carrier-Induced Degradation Under Pulsed Operation Conditions

Dynamic stress effects in submicron CMOS NAND and NOR gates

Hole and electron transport in SiO2

Oxide-silicon interface charge trapping effects; time constants

Physical effects involved in hot-carrier degradation

Trapping and detrapping of charge in SiO2

91142

by: Henderson, C.L., Soden, J.M., Sandia National Laboratories

title: ICFAX, An Integrated Circuit Failure Analysis Expert System

Analytical information

Artificial intelligence

Computer software program

DOS-based personal computers

Expert system

Failure analysis information

Failure analysis procedures

Failure analysis process flow

Failure analysis techniques

Failure mechanism

Integrated circuit failure analysis expert system (ICFAX), Sandia Labs

Level 5 object

Photographic information

Software programs

Training

91152

by: Shell, M.K., Golwalkar, S., Intel Corp.

title: Application of Infrared Microscopy for Bond Pad Damage Detection

Au-Al intermetallics

Ball bond damage

Bond pad cratering

Bond shear

C-Mode Scanning Acoustic Microscopy (C-Sam)

Corrosion

Cracks

Dielectric damage

Failure analysis

IR

Infrared microscope

Kirkendall voids

Mechanical damage detection

Microscopy

Near-infrared wavelength

Reflective infrared (IR) microscopy

Si damage

Si nodules

Temperature and humidity stresses

Wire pull

91160

by: Moore, T.M., McKenna, R., Kelsall, S.J., Texas Instruments Inc.

title: Correlation of Surface Mount Plastic Package Reliability Testing to Nondestructive Inspection by Scanning Acoustic Microscopy

Acoustic

Coefficient of Thermal Expansion (CTE)

Compressive stress

Delamination

Die surface delamination

Focused acoustic beam

Glass transition temperature

Impact of moisture on plastic package cracking

Intermittent wire bond contacts

Lead frame delamination

Moisture testing

Moisture/thermal-induced damage

Nondestructive analysis

Package cracking

Package reliability

Packaged voids

Plastic Leaded Chip Carrier (PLCC)

Plastic surface mount component cracking

Reflection technique

Scanning Acoustic Microscopy (SAM)

Shear displacement

Stress-induced passivation damage

Surface Mount Technology (SMT)

Surface mount plastic packages

Transducer

Vapor-phase solder reflow (VPR)

Wire bond degradation

91167

by: Matusiewicz, G.R., Kirch, S.J., Seeley, V.J., Blauner, P.G., IBM

title: The Role of Focused Ion Beams in Physical Failure Analysis

Circuit isolation

Cross-sectioning

Die deprocessing/delayering

Die probing

Electron beam

Endpoint detection

FIB induced deposition

Failure analysis

Focused ion beam (FIB) techniques

Ion beam

Ions

Isolator deposition technique

Material deposition

Material removal

Metal deposition

Sputtering

91171

by: Barker, S.A., Intel Corp.

title: Effects of Carbon on Charge Loss in EPROM Structures

C doping

Carbon

Carbon dioxide

Charge loss in EPROMS

Charge retention

EPROM

HCl gate oxide

Nonvolatile memory

Oxide, floating gate

Oxide, interpoly

Oxides

Polysilicon oxide

TDDB

TriCloroethAne (TCA)-oxides

91175

by: Mori, S., Sakagami, E., Kaneko, Y., Ohshima, Y., Arai, N., Yoshikawa, K., Toshiba Corp.

title: Threshold Voltage Instability and Charge Retention in Nonvolatile Memory Cell with Nitride/Oxide Double-Layered Inter-poly Dielectric

Charge loss

Charge retention

Charge retention of ONO Oxides

DRAM

EEPROM

EPROM

Flash EEPROM

Memories, nonvolatile

Modeling

NO (Nitride/Oxide)

Nonvolatile memory

ONO (oxide/nitride/oxide)

Oxides, NO

Programming EPROMs

Scaling

TDDB

Thermal aging

Threshold voltage shifts

Tunneling back

Vt shift

91183

by: Katayama, T., Mashiko, Y., Mitsuhashi, J., Koyama, T., Tsukamoto, K., Ikeda, S., Nakayama, A., Koyama, H., Tsubouchi, N., Mitsubishi Electric Corp.

title: A New Failure Mechanism Related to Grain Growth in DRAMs

Charge retention

Compressing stress

DRAM

Degraded retention time in DRAMS

Failure analysis

Gate-oxide leakage

Grain size, polysilicon

Oxide leakage

P-doping effect

Phosphorous concentration of polysilicon

Polysilicon

Retention time

Si protuberance

Stress effects

TDDB

TEM

VHT (variable hold time)

91188

by: Kapoor, A.K., Lin, C.-H., Oh, S.-Y., Hewlett Packard Laboratories

title: Effect of Emitter-Base Reverse Bias Stress on High Frequency Parameters of Bipolar Transistors

Base resistance

Bipolar transistors

Charge trapping

Cut-off frequency

Degradation of high frequency bipolar transistors

E-B stressing

Reverse bias of emitter base junction

Transit time

91193

by: Niitsu, Y., Yamaura, K., Momose, H., Maeguchi, K., Toshiba Corp.

title: Anomalous Current Gain Degradation in Bipolar Transistors

Beta degradation

BiCMOS

Bipolar

Bipolar transistors

CVD oxide

Charge trapping

E-B stressing

Forward tunneling

Gain degradation

Gain degradation of bipolar transistors

Interface traps

Lifetime prediction

Reverse bias Vbe

SRH current

Thermal oxide

hFE

91200

by: Christou, A., University of Maryland, Anderson, W.T., Naval Research Laboratory, Hu, J.M., University of Maryland

title: Reliability of InGaAs HEMTs on GaAs Substrates

Dislocations at InGaAs/GaAs interface after life test

GaAs HEMT and PHEMT reliability

In GaAs HEMT pseudomorphic, channel degradation due to traps

In GaAs HEMT pseudomorphic, structure effects on reliability

Trap generation in HEMTs under stress

91206

by: Canali, C., Dipartimento di Elettronica ed Informatica, Magistrali, F., Sangalli, M., Telettra S.p.A., Tedesco, C., Zanoni, E., Dipartimento di Elettronica ed Informatica, Castellaneta, G., Tecnopolis - CSATA, Marchetti, F., IRST

title: Reliability Aspects of AlGaAs/GaAs HEMTs

Accelerated life tests of HEMTS and PHEMTS

GaAs HEMT reliability comparisons of different suppliers

GaAs Schottky contacts, HEMT and MESFETs wearout comparisons

GaAs Schottky contacts, HEMT improvements with barrier layers

GaAs Schottky contacts, HEMT improvements with refractory metals

GaAs ohmic contacts, HEMT and MESFETs wearout comparisons

GaAs ohmic contacts, HEMT improvements with barrier layers

HEMT, failure mechanisms

Schottky barrier instabilities

Source and drain resistance changes

91214

by: Maurer, R.H., Bargeron, C.B., Benson, R.C., Chao, K., Nhan, E., Wickenden, D.K., Johns Hopkins University Applied Physics Lab

title: Failure Analysis of Aged GaAs HEMTs

GaAs HEMT reliability comparisons of different suppliers

Gate failures cause by surface defects

HEMT failure mechanism

Surface defects in GaAs HEMTs

91224

by: Magistrali, F., Sala, D., Salmini, G., Telettra S.p.A., Fantini, F., Ist.Scienze dell' Ingegneria, Giansante, M., CNR-LAMEL, Vanzi, M., Telettra S.p.A.

title: ESD-Related Latent Failures of InGaAsP/InP Laser Diodes for Telecommunication Equipment

ESD damage in InGaAs/InP laser diodes

InGaAs/InP laser diode reliability

Latent ESD failures in laser diodes

91234

by: Shiojima, K., Okumura, T., Tokyo Metropolitan University

title: Mapping Evaluation of Inhomogeneously Degraded Au/Pt/Ti Contact to GaAs

Au-platinum-titanium Schottky gate GaAs contacts, degradation mechanisms

Au/GaAs interdiffusion causing contact degradation

Correlating barrier degradation and diffusion

Optical measurements on Au-platinum-titanium Schottky gate GaAs contacts

Photoemission microscopy, use to evaluate Schottky contacts

Scanning internal photoemission, failure analysis technique for Schottky GaAs gate

91239

by: Aton, T.J., Joyner, K.A., Blanton, C.H., Appel, A.T., Harward, M.G., Bennett-Lilley, M.H., Mahanti-Shetti, S.S., Texas Instruments Inc.

title: Using Scanned Electron Beams for Testing Microstructure Isolation and Continuity

Charge Induced Scanning Microscope Evaluation and Testing (CISMET)

Charge-induced scanning microscope

Continuity testing

E-beam tester

Isolation/continuity testing

Pattern testing

Scanned electron beams

Scanning Electron Microscope (SEM)

Secondary electrons (SEs)

Silicon On Insulator (SOI)

Voltage contrast

91245

by: Yasuda, A., Yamaguchi, H., Tanabe, Y., Owada, N., Hirasawa, S., Hitachi Ltd.

title: Direct Measurement of Localized Joule Heating in Silicon Devices by Means of Newly Developed High Resolution IR Microscopy

Emissivity

High resolution IR (Infrared rays) microscope

IR microscope

Infrared microscopy

Joule heating

Localized joule heating

Measuring localized joule heating

Silicon On Insulator (SOI)

Temperature testing

Thermal behavior

Thermal conduction of SiO2

Thermal conductivity

91250

by: Rodgers, M.R., Digital Instruments, Inc.

title: Application of The Atomic Force Microscope to Integrated Circuit Reliability and Failure Analysis

Atomic Force Microscopy (AFM)

Atomic resolution

Atomic structure

Cantilever deflection

Compact disks

Confocal microscope

Electron microscopes

Failure analysis

Grain size

Grain structure

Image processing

Insulator surface imaging

Metal grains

Non-contact mode

Photomasks

Photoresist

Piezoelectric scanner

SEM

Scanning Probe Microscopy (SPM)

Scanning Tunneling Microscope (STM)

Silicon nitride cantilever

Surface roughness

Surface topology imaging

Three dimensional surface measurement

Topographic images

Ultra-high resolution measuring technologies

91255

by: Onishi, S., Ayukawa, A., Sakiyama, K., Sharp Corp.

title: Formation of a Defect-Free Junction Layer by Controlling Defects Due to As+ Implantation

As+ implantation in LDD structure

Junction leakage failures due to residual defects: eliminated

Radiation damage due to ion implantion

Si3N4 film as a implantation mask vs SiO2

91260

by: Trindade, D.C., Advanced Micro Devices

title: Can Burn-In Screen Wearout Mechanisms? Reliability Modeling of Defective Subpopulations - A Case Study

Case study with 50% burn-in rejects due to sodium

Defective subpopulations screened out

91264

by: Suyko, A., Sy, S., Intel Philippines Mfg. Inc.

title: Development of a Burn-in Time Reduction Algorithm Using the Principles of Acceleration Factors

Acceleration factor, electric field

Acceleration factor, temperature

Burn-in at 140 °C for 1 hr.

Burn-in time reduction

91271

by: Huston, H.H., Wood, M.H., DePalma V.M., IBM

title: Burn-in Effectiveness - Theory and Measurement

Burn-in experiment with MCM

SRAM Burn-in acceleration factor of 11 by programmed electrical switching

91277

by: Crowell, C.R., Shih, C.-C., Tyree, V.R., University of Southern California

title: SWEAT Structure Design and Test Procedure Criteria Based upon TEARS Characterization and Spatial Distribution of Failures in Iterated Structures

Design of SWEAT electromigration test structures

Effect of number of segments on distribution of failures

SWEAT test procedure based on `'Tears'' thermal model

91287

by: Dion, M.J., Harris Semiconductor/SEMATECH

title: EXTRA-EM: Extraction of Temperature and Resistance for Acceleration of Electromigration at Wafer Level

SWEAT test procedure based on `'EXTRA-EM'' thermal model

Thermal modeling of wafer level electromigration test structures

91298

by: Katto, H., Harada, M., Higuchi, Y., Hitachi Ltd.

title: Wafer-Level Jramp & J-Constant Electromigration Testing of Conventional & Sweat Patterns Assisted by a Thermal & Electrical Simulator

Electromigration model, thermal and electrical simulator

Temperature profile in sweat structure, thermal conductivites of metal and oxides

Wafer-level metal electromigration, J-Ramp, J-constant method

91306

by: Tonti, W.R., Noble, W.P., Abadeer, W.W., Mittl, S.W., IBM, Haensch, W.E., Siemens Components Inc.

title: Doping Profile Design for Substrate Hot-Carrier Reliability in Deep Submicron Field Effect Transistors

Channel implant doses for submicron MOSFETs

Hot-carrier reliability in deep-submicron MOSFETs

Modeling of substrate hot-carrier effects

Process design for hot-carrier reliability; dopant profile effects

Substrate hot-carrier (SHC) stress effects in submicron CMOS

91310

by: Nishida, T., Thompson, S.E., University of Florida

title: Oxide Field and Temperature Dependences of Gate Oxide Degradation by Substrate Hot Electron Injection

Gate oxide process dependence of hot-carrier degradation

Hot-carrier effects at 77K

Measurement technique for energy spectrum of oxide traps

Oxide field and temperature dependences of gate oxide hot-carrier degradation

91316

by: Joshi, A.B., Lo, G.Q., Kwong, D.L., University of Texas at Austin, Lee, S., NCR Corporation

title: Improved Performance and Reliability of MOSFETs with Thin Gate Oxides Grown at High Temperature

Comparison of MOSCAP and MOSFET characterization of thin oxides

Dry oxygen oxidation of Si in the temperature range 800-1100°C

Gate oxidation temperature effects on MOSFET parameters and reliability

Mechanisms of channel hot electron degradation and gate induced drain leakage

Radiation sensitivity as a function of gate oxidation temperature

Thermal budget constraints in ULSI processing

Thin (11 nm) gate oxide MOSFET device hot-carrier degradation

91323

by: Ting, W., Lo, G.Q., Ahn, J., Chu, T.Y., Kwong, D.L., University of Texas at Austin

title: Comparison of Dielectric Wear-out Between Oxides Grown in O2 and N2O

Comparison of dielectric wearout in N2O and O2-grown oxides

N2O (nitrous oxide) oxidation of Si

Polarity dependence of charge-to-breakdown in N2O grown oxides: data and model

Transconductance degradation of MOSFETs with N2O and O2-grown gate oxides

Ultrathin (6 nm) gate dielectric properties

91327

by: LeBlanc, J.P., Chaine, M.D., Texas Instruments Inc.

title: Proximity Effects of "Unused" Output Buffers on ESD Performance

Lateral SCR devices

Post ESD stress leakage

Proximity effect ESD failures

91331

by: Ushiyama, M., Ohji, Y., Nishimoto, T., Komori, K., Murakoshi, H., Kume, H., Tachi, S., Hitachi Ltd.

title: Two Dimensionally Inhomogeneous Structure at Gate Electrode/Gate Insulator Interface Causing Fowler-Nordheim Current Deviation in Nonvolatile Memory

Annealing process temperature effects on oxide surface roughness

Atomic force microscopic analysis of oxide surfaces

Doping concentration effects in polysilicon gate electrode processing

Flash EEPROM tunnel oxide erase dependence on device processing

Oxide surface roughening by phosphorus reaction; effect on F-N I-V uniformity

Polysilicon electrode/gate oxide interface effects

91337

by: Crook, D.L., Intel Corp.

title: Detecting Oxide Quality Problems Using JT Testing

Charge collection multiplier test structures for oxide quality, use of

Gate oxide defect detection: separation of mechanisms

JEDEC ramp voltage and JT test comparison

Process induced charging damage of gate oxides