93001

by: Shiono, N., Itsumi, M., NTT LSI Laboratories

title: A Lifetime Projection Method Using Series Model and Acceleration Factors for TDDB Failures of Thin Gate Oxides

Electric field acceration, reciprocal field model, validity

Failure probablity distribution, Weibull, suitability

Lifetime prediction, thermal oxide (SiO2)

TDDB characterized with series model

TDDB electric field and temperature acceleration

TDDB failures described with Weibul Distributed

TDDB gate area effects

TDDB under pulse bias stress

TDDB, area dependence, series model

TDDB, constant voltage

TDDB, thermal oxide (SiO2)

TDDB, unipolar pulsed voltage

Thermal activation energy, field dependence

93007

by: Schuegraf, K.F., Hu, C., University of California, Berkeley

title: Hole Injection Oxide Breakdown Model for Very Low Voltage Lifetime Extrapolation

Breakdown prediction, breakdown charge (QBD)

Breakdown prediction, breakdown time (TBD)

Direct tunneling thin oxide conduction model

Electron conduction, thin oxide (SiO2), Fowler-Nordheim (FN) tunneling

Electron conduction, thin oxide (SiO2), direct tunnelling

Intrinsic silicon dioxide breakdown phenomena

Oxide (SiO2) breakdown mechanism, anode hole injection model, low voltage

Silicon dioxide breakdown anode hole injection model

Silicon dioxide breakdown quantitative model

93013

by: Fang, S., McVittie, J.P., Stanford University

title: A Mechanism for Gate Oxide Damage in Nonuniform Plasma

Capacitor, MOS, antenna

Capacitor, MOS, trench

Electron current in (SiO2) plasma-induced SPICE simulation

Electron current in (SiO2) plasma-induced sheath voltage effect

Gate oxide damage by antenna charging effect

Gate oxide damage in nonuniform plasmas

Oxide (SiO2) breakdown, device structure effect

Oxide (SiO2) breakdown, plasma process effect

Oxide (SiO2) damage plasma process, O2, nonuniform

Plasma induced wafer charging model

93018

by: Strong, A.W., Stamper, A.K., Bolam, R., Furukawa, T., Gow, C., Gow, T., Martin, D,W., Mittle, S.W., Nakos, J.S., Pennington, S.L., IBM Corporation

title: Gate Dielectric Integrity and Reliability in 0.5µm CMOS Technology

Failure analysis with electron-beam-induced-currents

Gate dielectric degradation by passivation layer deposition

Gate dielectric process integration issues

Gate dielectric yield measurement with antenna structures

93022

by: Henley, W.B., Jastrzebski, L., University of South Florida, Haddad, N.F., IBM Corporation

title: Effects of Iron Contamination on Thin Oxide Breakdown and Reliability Characteristics

Electric field enhancement, 2D defect simulation

Gate oxide electrostatic model for iron defects

Oxide (SiO2) breakdown, iron (Fe) contamination effect

Oxide (SiO2) breakdown, oxide thickness effect

Oxide reliability, thermal SiO2, Al gate, iron (Fe) contamination effect

Surface photovoltage (SPV), iron (Fe) contamination

Thin oxide breakdown by iron contamination in Si

93028

by: Rajagopalan, S., Mitra, U., Pan, S., Gupta, K., Lin, C.M., Sery, G., Mittal, S., Hasserjian, K., Lo, W.J., Neubauer, G., Intel Corporation

title: Reaction of DI Water and Silicon and its Effect on Gate Oxide Integrity

Atomic Force Microscopy for Si surface roughness measurement

Corrosive Si attack by OH ions

DI water etch of Si, descriptive model

Gate oxide integrity effects by pre-gate chemical treatment

Micro-roughness of Si and gate oxide quality

Oxide reliability, thermal SiO2, Si gate, surface roughness effect

Si surface micro-roughness, HF treated, deionized (DI) water effect

93032

by: Chan, V.-H., Kim, J.S., Chung, J.E., MIT

title: Parameter Extraction Guidelines for Hot-Electron Reliability Simulation

Hot-carrier-induced degradation, channel MOSFETS (nMOSFETs) lifetime technique review

Hot-carrier-induced degradation, impact of local oxide electric field (gate to drain voltage)

Hot-carrier-induced degradation, models and calibration of reliability simulators

Hot-carrier-induced degradation, saturation of degradation

Hot-carrier-induced degradation, simulation of AC stress

Hot-carrier-induced degradation, statistical analysis of DC stress

Hot-carrier-induced degradation, testing methodolgies

Hot-carrier-induced degradation, tradeoff between test time and number of devices

93038

by: Huang, D.H., King, E.E., ARACOR, Palkuti, L.J., Defense Nuclear Agency

title: Improved Method for Evaluating Hot-Carrier Aging in p-Channel MOSFET's

Hot-carrier-induced degradation, 0.5 micron p-channel MOSFETs (pMOSFETs)

Hot-carrier-induced degradation, constant electron injection test technique

Hot-carrier-induced degradation, constant gate test method

Hot-carrier-induced degradation, eliminates saturation of degradation with time

Hot-carrier-induced degradation, experimental results

Hot-carrier-induced degradation, substrate current used for lifetime prediction

93043

by: Pan, Y., National University

title: The Hot-Carrier Induced Degradation Mechanisms of 0.8µm LDD p-MOSFET with 850°C Wet Gate Oxidation

Hot-carrier-induced degradation, in 0.8 micron pMOSFETs with lightly doped drains

Hot-carrier-induced degradation, pMOSFETs with 850 centigrade wet gate oxidation

Hot-carrier-induced degradation, saturation drain current logarithmic time dependence

Hot-carrier-induced degradation, saturation of linear drain current with time

93048

by: Higman, J.M., Orlowski, M., Motorola Inc.

title: Monte Carlo Simulation of Deep-Submicron SOI and Conventional nMOSFET Hot-Electron-Induced Degradation

Hot-carrier-induced degradation, 20 MHz dynamic (AC) stress

Hot-carrier-induced degradation, comparison dynamic and static stress

Hot-carrier-induced degradation, due to channel hot-carriers

Hot-carrier-induced degradation, experimental findings

Hot-carrier-induced degradation, in 0.6 micron nMOSFETs

Hot-carrier-induced degradation, in voltage controlled oscillator(VCO)

Hot-carrier-induced degradation, shift in VCO frequency

Hot-carrier-induced degradation, threshold voltage and transconductance change

93053

by: Jiang, C., VLSI Technology,Inc., Johnson, E., VLSI Technology, Inc., Shaw, J.J., Intel Corporation, Hu, C., University of California

title: AC Hot-Carrier Degradation in a Voltage Controlled Oscillator

CMOS MOSFETs, sub-quarter-micron

Hot-electron induced degradation, simulated comparison of SOI and nMOSFETs

Hot-electron induced degradation,in SOI, function of gate material

Hot-electron induced degradation,theoretical

Hot-electrons, function of lateral and vertical oxide electric field

Monte carlo simulation, comparison of SOI and conventional nMOSFETs to hot electrons

Monte carlo simulation, frozen field calculation

SOI nMOSFETs, fully depleted thin-film

93057

by: Snyder, E.S., Campbell, D.V., Swanson, S.E., Pierce, D.G., Sandia National Laboratories

title: Novel Self-Stressing Test Structures for Realistic High-Frequency Reliability Characterization [BPA]

Hot-carrier-induced degradation, 1 micron CMOS

Hot-carrier-induced degradation, 230 MHz dynamic stress

Hot-carrier-induced degradation, complete recovery of saturation drain current by annealing

Hot-carrier-induced degradation, electron traps and donor-like interface states

Hot-carrier-induced degradation, experiment and modeling

Hot-carrier-induced degradation, experimental findings

Hot-carrier-induced degradation, lifetime variation with temperature at high frequencies

Hot-carrier-induced degradation, model for variation with stress frequency to 200 MHz

Hot-carrier-induced degradation, model for variation with stress of inverter and nMOSFET

Hot-carrier-induced degradation, quasi-static model

Hot-carrier-induced degradation, self-stressing test structures

Hot-carrier-induced degradation, statistical analysis of high frequency stress

Hot-carrier-induced degradation, statistical model for lifetime

Reliability test simulation, test structures for calibration at high frequencies

Reliability test structures, electromigration

Reliability test structures, high frequency reliability characterization with DC test system

Reliability test structures, hot-carrier induced degradation

Reliability test structures, model for DC-controlled high frequency oscillator

Reliability test structures, oxide breakdown

Reliability test structures, temperature sensor and heater

Reliability test structures, use on-chip frequency source for high frequency stressing

93066

by: Chin, D., Pan, S., Wu, K., Intel Corporation

title: Geometry Effect on CMOS Transistor Stability Under DC Gate Stress

Electron trapping, SOI devices more sensitive than nMOSFETs

Electron-hole pair generation, less in SOI than nMOSFETs

Hot-carrier-induced degradation, channel length and width dependence

Hot-carrier-induced degradation, due to high voltage DC gate stress

Hot-carrier-induced degradation, due to substrate hot-carriers

Hot-carrier-induced degradation, experimental findings

Hot-carrier-induced degradation, in CMOS transistors

Hot-carrier-induced degradation, negative trapped charge for positive gate stress

Hot-carrier-induced degradation, nonuniform interface states for negative gate stress

Hot-carrier-induced degradation, three distinct damage regions

93071

by: Wada, J., Suguro, K., Hayasaka, N., Okano, H., Toshiba Corporation

title: New Method of Making Al Single Crystal Interconnections on Amorphous Insulators

Agglomeration phenomena

Annealing, sequential

Crystal orientation of single crystal Al

Electromigration-resistance of single crystal Al

Free energy

In-situ anneal

Polycrystalline Al, interconnects

Single crystal Al, interconnects

Surface migration

Surface tension

93077

by: Pietrucha, B.M., AT&T Bell Laboratories

title: The Role of Field Performance Information in Building in Reliability

Build-in reliability

Field failure feedback path

Field performance

ISO-9000

National Electronic Process Certification Standard (NECPS)

Qualified Manufacturers List (QML)

Root cause

Screening limitations

Screening methodology

93081

by: van Geest, D.C.L., Hoeksma, R.H., Twente University, Brombacher, A.C., Philips Consumer Electronics, Herrmann, O.E., Twente University

title: Integration of Physical Reliability Knowledge Into the Design of VLSI-Circuits

Degradation behavior

Failure mechanism specific operational knowledge base

Markov method

Monte carlo simulation

Stress susceptibility interaction

Stressor set

Stressor/susceptibility interaction

Susceptibility probability density function

Time dependent stressor distribution

93087

by: Prendergast, J., Analog Devices B.V.

title: Reliability, Yield and Quality Correlation For A Particular Failure Mechanism

Gate oxide rupture

Linear dependence of yield reliability

Poly-p+ channel stop short

Quality-reliability relationship

Wafer acceptance test, parametric probe

Wafer sort, probe

Yield-reliability relationship

93094

by: Tse, P.K., AT&T Bell Laboratories, Picard, L.J., AT&T Microelectronics, Swaub, J.E., AT&T Bell Laboratories, Brown, R.W., AT&T Microelectronics, Gurnett, C.J., AT&T GBCS, Terefenko, G.J., AT&T Microelectronics

title: Failure Mechanisms of Thin Silicon Tantalum Integrated Circuit (STIC) Resistors on Multi-Chip Module (MCM)

Destabilization of Ta205 w/high pH electrolyte

Field-induced Ta2N anodization

Monolithic thin film resistors, Si tantalum integrated circuit (STIC) resistors

Multi-chip module, STIC resistor failure mechanism

STIC resistors, MCM applications

STIC resistors, anodization and resistance shift

STIC resistors, failure mechanisms and failure rate estimate

STIC resistors, tester resistor design and fabrication

STIC resistors, thermal stabilization

Si Tantalum integrated circuit (STIC) resistors, failure mechanisms

Ta2N anodization

Thermal activation of Ta2N anodization

93103

by: Sato, K., Okinaga, T., Kohara, T., Ota, T., Hitachi VLSI Engineering Corp., Otsuka, K., Honda, A., Mizuno, C., Hitachi, Ltd.

title: Investigation of Short Circuit Caused by Reduction of PbO Sealing Glass Used for VLSI Package

Ceramic package, short circuit by reduction of sealing glass

Dendritic Pb formation

Galvanic reduction

H2 outgassing from Mo heat sinks

Lead frame finger short

Molybdenum heat sink, reaction with PbO sealing glass

Sealing glass reduction by reaction with molybdenum

Sealing glass, lead oxide (PbO) sealing glass short circuit

93108

by: van Gestel, R., Schellekens, H., Delft University of Technology

title: 3D Finite Element Simulation of the Delamination Behaviour of a PLCC Package in the Temperature Cycle Test

Delamination, 3D simulation of a PLCC package during temp cycle

Die-mold compound delamination during thermal cycling

Exponential dependence of crack growth on thermal cycles

Exponential dependence of delamination growth with thermal cycles

Finite element analysis, 3D simulation PLCC package in temp cycle

Moisture sensitivity, 3D simulation of delamination in a PLCC package during temp cycle

Nodal lumped integration for FEM

Plastic package 3D simulation of delamination in a PLCC package in a temp cycle

Surface mount technology, 3D simulation of delamination in a PLCC during temp cycle

93122

by: Zhao, J., Li, G.P., University of California, Liao, K.Y., Chin, M.R., Hughes Aircraft, Sun, J.Y.-C, IBM Corporation, Chiu, T.Y., AT&T Bell Laboratories

title: Current Gain Increase of n-p-n Transistors by Electromigration of Atomic Hydrogen in Emitter Polysilicon

Bipolar current gain instability

Hydrogen electromigration in polysilicon

93127

by: Brand, A., Wu, K., Pan, S., Chin, D., Intel Corporation

title: Novel Read Disturb Failure Mechanism Induced By FLASH Cycling

Flash EPROM, cycling effects

Flash EPROM, data retention

Flash EPROM, read disturb

93133

by: Dunn, C., P., Hefley, P., Pope, S., Lewis, T., Chong, D., Desai, S., Patel, P., Baker, D., Dolby, D., Strauss, T., Gunturi, S., Wright, P., Sudak, P, Texas Instruments, Inc.

title: Process Reliability Development for Nonvolatile Memories

EPROM UV erase, passivation effects

EPROM data retention, passivation effects

Electron trapping in reoxidized nitrided dielectrics

Flash EPROMs, gate dielectrics for

Humidity performance, passivation effects

Reoxidized nitrided dielectrics for Flash EPROMs

Textured polysilicon, process effects

93147

by: Abadeer, W., Tonti, W., IBM Corporation, Hansch, W., Schwalke, U., Siemens Components Inc.

title: Bias Temperature Reliability of n+ and p+ Polysilicon Gated n-MOSFETs and p-MOSFETs

Bias-temperature Vt instability

Boron doped polysilicon, effect on oxide trapping

Role of boron in oxide trapping

p+ polysilicon, effect on oxide trapping

93150

by: Ohno, Y., Kimura, H., Sonoda, K., Satoh, S., Mitsubishi Electric Corp., Sayama, H., Hara, S., Takai, M., Osaka University, Miyoshi, H., Mitsubishi Electric Corp.

title: Soft-Error Study of DRAMs Using Nuclear Microprobe

Soft errors, cell vs. bitline sensitivity

Soft errors, effect of retrograde wells

Soft errors, local sensitivity to

Soft errors, observation with nuclear microprobe

93156

by: Burnett, D., Lage, C., Bormann, A., Motorola Inc.

title: Soft-Error-Rate Improvement in Advanced BiCMOS SRAMs

Soft errors, improvement with buried layer

Soft errors, improvement with triple well

93161

by: Ameraqsekera, A., Chatterjee, A., Chang, M.-C., Texas Instruments, Inc.

title: Prediction of ESD Robustness of a Process Using 2-D Device Simulations

ESD protection performance, NMOS

ESD protection performance, effect of processing technology

ESD robustness

ESD robustness - 2D model

ESD robustness - peak power density

ESD susceptibility - modeling

Peak power density, correlation to ESD performance

Second breakdown trigger current, correlation to ESD performance

Simulations, ESD events

Simulations, electrothermal

93168

by: Campbell, A.N., Cole, Jr., E.I., Dodd, B.A., Anderson, R.E., Sandia National Laboratories

title: Internal Current Probing of Integrated Circuits Using Magnetic Force Microscopy [OPA]

Atomic Force Microscopy (AFM)

Current imaging IC conductors

Current mapping

Failure analysis, IC

Fault isolation techniques

Fault isolation, current mapping

Magnetic Force Microscopy

Microscopy, Magnetic Force

Microscopy, Scanned Probe

Microscopy. Atomic Force

Scanned Probe Microscopy

Scanning force microscopy

93178

by: Bruce, V., Advanced Micro Devices

title: Energy Resolved Emission Microscope

CCD camera, as emission detector

Electroluminescence spectroscopy

Emission microscopy

Emission microscopy, energy resolved

Emission microscopy, flat fielding

Emission microscopy, image processing

Emission microscopy, spectrally corrected

Failure analysis, IC

Flat fielding, optical

Hot-carriers, energy distribution

Microscopy, light emission

Photo Emission Microscopy

93184

by: Tsujide, T., Hamada, H., NEC Corporation, Lepejian, D., Caywood, J.M., Heuristic Physics Labs, Inc.

title: Automatic Memory Failure Analysis Using an Expert System in Conjunction with a Memory Tester/Analyzer

Expert system - memory device failure analysis

Expert system, IC failure analysis

Failure Mode Analysis (FMA)

Failure analysis, DRAM

Fault isolation - expert system

Fault isolation techniques

Fault table, DRAM

Memory device failure analysis - expert system

Memory device failures - Pareto ranking

Memory device failures - trend monitoring

93190

by: Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., National University, Cronquist, B., Chartered Semiconductor Mfg.

title: A New Low-Voltage Contrast Mechanism to Image Local Defects in Very Thin Silicon Dioxide Films: True Oxide Electron Beam Induced Current

Electron beam induced current (EBIC) - Displacement Current Contrast

Electron beam induced current (EBIC) - Tunneling Current Microscopy

Electron beam induced current, capacitively coupled (CEBIC)

Electron beam induced current, true oxide (TOEBIC)

Oxide defect imaging

Oxide defect mapping

Oxide defects, MOS capacitors

SEM voltage contrast

Tunneling current microscopy

Voltage Contrast

93199

by: Fixl, A.J., Schlumberger Technologies, Jenkins, K.A., IBM, Wilsher, K,R., Schlumberger Technologies, Immediator, M.J., Perincheril, L., Shin, H.J., IBM

title: Laser Stimulated Electron-Beam Prober for 15ps Resolution Internal Waveform Measurements of a 5 Gb/s ECL Circuit

E-beam, pulsed

E-beam, transit time effects on bandwidth

Electron beam prober, very high speed

Electron beam, laser stimulated

Electron beam, pulsed photocathode

Failure analysis, IC

Photocathode, E-beam source

Photocathode, pulsed laser induced photoemission

Waveform measurement, E-beam Probe

Waveform measurement, high resolution

93204

by: Tuhus, T., University of Oslo, Bjorneklett, A., Center for Industrial Research

title: Thermal Cycling Reliability of Die Bonding Adhesives

Adhesive die attach, plastic package

Adhesive die attach, temperature cycle endurance

Adhesive die attach, thermal resistance

Coefficient of Thermal Expansion (CTE), adhesive die attach

Die bonding adhesives

Epoxy, Ag-filled adhesive

Fatigue

Grain boundary sliding

Hard solders

Mechanical stress

Number of cycles to failure

Package reliability

Plastic packages

Polyimide, Ag-filled adhesive

Soft solders

Solder, ultimate shear strain

Stress relaxation

Substrate metallization

Temperature cycling

Test chips, thermal

Thermal cycling reliability

Thermal resistance, plastic package

93209

by: Pinizzotto, R.F., Jacobs, E.G., Wu, Y., Sees, J.A., Foster, L.A., Pouraghabagher, C., University of North Texas

title: The Dependence of the Activation Energies of Intermetallic Formation on the Composition of Composite Sn/Pb Solders

Activation energy, tin/Cu intermetallics

Composite solder

Cu Tin, intermetallic formation, activation energy

Cu Tin, intermetallic formation, scanning electron microscopy

Cu Tin, intermetallic formation, transmission electron microscopy

Cu Tin, thin film, diffusion couples

Diffusion barrier, nickel

Diffusion barrier, tin/Cu

Diffusion coefficient, intermetallic

Eutectic solder

Flux, RMA

Intermetallic, tin lead solders on Cu

Solder joint reliability, effect of tin/Cu intermetallics

Solder joints, surface mount technology

Solder, Tin(63)/Lead(37)

Surface Mount Technology (SMT)

Tin Lead solder, intermetallics

93217

by: Shirley, C.G., Shell-De Guzman, M., Intel Corporation

title: Moisture-Induced Gold Ball Bond Degradation of Polyimide-Passivated Devices in Plastic Packages

Au Al, intermetallic formation

Ball bond shear testing

Board-mount stress

Bond degradation

Bond pad metallization

Bond shear

Bond strength

Bonder force

Bonder power

Bonding parameters

HAST, Highly Accelerated Stress Test

Interfacial fracture

Kelvin resistance measurements

Kirkendall voiding

Lead frame

Low bonding parameters

Mis-targeted bonds

Moisture preconditioning

Moisture sensitivity

Moisture-induced, ball bond degradation

Moisture-induced, bond degradation in plastic packages

Off-pad bonds

Package reliability

Peck moisture-related failures

Plastic package, Au ball bond reliability

Polyimide die coat

Polyimide passivation, bond degradation in plastic packages

Pre-bake

Thin film cracking

Ultrasonic bonding

Vapor-phase solder reflow (VPR)

Wire bond degradation with polyimide passivated die in plastic packages

Wire bond, Au ball bond reliability in plastic packages

Wire bond, moisture-induced Au ball bond degradation

Wire bond, off pad bonding effect on reliability

Wire bonding

Wire breaks

Wire pull testing

93227

by: Shook, R.L., Conrad, T.R., AT&T Bell Laboratories

title: Accelerated Life Performance Of Moisture Damaged Plastic Surface Mount Devices

Autoclave testing

Ball bond lifting

Bond false healing

Contaminant ingression

Corrosion

Cracking, SMT package moisture-induced

De-capsulation

Delamination, SMT package moisture-induced

Die surface delamination

Failure Mode Analysis (FMA)

Flux activation

Humidity chamber

Infrared solder reflow (IR)

Lead frame delamination

Lead frame, Ag spot

Lead frame, Cu

Lead-to-lead leakage

Moisture ingression

Moisture preconditioning

Moisture sensitivity, plastic SMT packages

Moisture-induced cracking & delamination in plastic packages

PLCC, 32 pin, 44 pin

Plastic package FITs

Plastic surface mount packages, reliability performance

Polyimide die coat

Popcorn cracks

Power cycling

Pre-bake

Preconditioning, plastic SMT packages

RH, 85°C/60%, 85°C/85%

Reliability performance, with moisture-induced solder reflow damage

SOJ, 28 pin

Scanning acoustic microscopy, analysis of plastic packages

Static bias, 5V

Surface mount technology, corrosion induced performance degradation

Surface mount technology, moisture sensitivity of plastic SMT packages

Surface mount technology, moisture-induced cracking & delamination in plastic packages

Surface mount technology, preconditioning to simulate board assembly process

Surface mount technology, solder reflow damage in plastic packages

Temperature cycling

Temperature-Humidity-Bias test (THB)

Water solube flux

Weibull distribution

93236

by: Tay, A.A.O., Tan, G.L., National University, Lim, T.B., Texas Instruments Pte Ltd.

title: A Criterion for Predicting Delamination in Plastic IC Packages

Adhesion promoter

Adhesion strength

Crack tip

Cracking, SMT package moisture-induced

Delamination, SMT package moisture-induced

Finite element analysis, plastic surface mount devices, SOJ package

In-plane shear stress

Infrared solder reflow (IR)

Lead frame dimples

Lead frame, Cu

Lead frame, alloy 42

Linear elastic fracture mechanics (LEFM)

Mold compound, cure temperature, post mold cure

Package development, integrity, reliability

Plane stress & strain

Plastic package cracking, delamination

Poisson's ratio

Preconditioning, plastic SMT packages

Prediction, cracking in plastic packages

Prediction, delamination in plastic packages

RH, 85°C/40%, 85°C/65%, 85°C/85% test

Shear modulus, stress

Stress analysis, distribution

Surface mount technology, critical stress intensity factor in plastic packages

Surface mount technology, leadframe/mold compound adhesion/stress

Surface mount technology, stress induced delamination in plastic packages

Thermal mismatch

Vapor-phase solder reflow (VPR)

Zero stress temperature

93244

by: Van Doorselaer, K., Hente, A., Alcatel Bell, Saboui, A., Moscicki, J.-P., SGS-THOMSON Microelectronics

title: Thin Type Packaging: An Effective Way to Improve the Popcorn Resistance of Plastic-Packaged IC's

Adhesion

Autoclave testing

Cracking, SMT package moisture-induced

Delamination, SMT package moisture-induced

Die surface delamination

HAST, Highly Accelerated Stress Test

High density packaging

Lead frame, alloy 42

Low loop wire bonding

Metal shifting

Moisture absorption

Moisture ingression

Moisture preconditioning

Moisture sensitivity, plastic SMT packages

Moisture-damaged packages

Mold compound

Package integrity

Package reliability

Plastic Quad Flat Package (PQFP)

Plastic package delamination

Popcorn resistance

Pre-bake

Preconditioning, IPC type

Preconditioning, plastic SMT packages

RH, 125°C/85%, HAST test

RH, 35°C/75%, 85°C/30%, 85°C/65%, 85°C/85%, tests

Scanning Acoustic Microscopy (SAM)

Surface mount technology, thin plastic Quad flat package (TQFP)

TQFP, 1.0 mm & 1.4 mm thick, 64 & 100 pins

TQFP, moisture absorbtion and resistance

TQFP, package cracking (popcorn)

Temperature cycling

Temperature-Humidity-Bias test (THB)

Thermomechanical mismatch

Wire bond degradation

93250

by: Duffalo, J.M., Erhart, D.L., Schmok, S.C., Motorola Inc.

title: Novel Failure Modes with Overmolded Printed Circuit Board-based Surface Mount Packages

Autoclave

Ball array, plastic package

Broken bond wires

Corrosion

Cracking, SMT package moisture-induced

Delamination, SMT package moisture-induced

Die surface delamination

Gross leak test

Heat spreader

Infrared solder reflow (IR)

Interfacial delamination

Laser interferometry

Lead frame

Lifted ball bonds

MIL STD-883C Method 1011C

Material interfaces

Mechanical cross-sectioning

Moisture sensitivity, plastic SMT packages

Mold compound adhesion

Multi-chip Module (MCM)

Overmolded printed circuit board

PQFP, 64 pin & 160 pin PCB-based

Package design

Package reliability

Plastic Quad Flat Package (PQFP)

Plastic package, ball array package

Plastic package, printed circuit board based packages

Popcorn performance

Pre-bake

Preconditioning, plastic SMT packages

Printed Circuit Board (PCB)

RH, 85°C/30%, test

Scanning Acoustic Tomography (SAT)

Scanning Laser Acoustic Microscopy (SLAM)

Solder ball array carriers

Soldermask delamination

Stress induced fatigue

Surface Mount Devices (SMD)

Surface mount technology, overmolded printed circuit board based package

Temperature cycling

Thermal expansion mismatch

Thermal shock

Thick film fabrication

Wire bond fatigue

X-ray analysis

93255

by: Crook, D.L., Domnitei, M., Webb, M.K, Bonini, J., Intel Corporation

title: Evaluation of Modern Gate Oxide Technologies to Process Charging

Capacitor, MOS, antenna

Gate oxide CV/IV walkout measurement technique

Gate oxide charge trapping at point defects

Gate oxide process induced charging

IV/CV measurement, trapped charge effect, walkout, flatband shift

MOS capacitance-voltage (CV) measurement

MOS current-voltage (IV) measurement

MOS gate oxide, thermal SiO2, N20 anneal

MOS gate oxide, thermal chemical-vapor-deposition (CVD) composite

Oxide,(SiO2) breakdown, current density-time (Jt) measurement

93262

by: Tang, Y., Chang, C., Haddad, S., Wang, A., Lien, J., Advanced Micro Devices

title: Differentiating Impacts of Hole Trapping vs. Interface States on TDDB Reduction in Thin Oxide Gated Diode Structures

MOS gated diode, thermal oxide (SiO2), interface state generation

MOS gated diode, thermal oxide (SiO2),hole trapping

Oxide pre-stress influence on TDDB

TDDB impact of hole trapping verus interface states

TDDB independence of hole or electron injection

TDDB reduction correlation with hot-carriers

TDDB reduction through hot-carrier bombardment

93272

by: Shin, H., Noguchi, K., Hu, C., University of California

title: Thickness and Other Effects on Oxide and Interface Damage by Plasma Processing

Enhanced hot-carrier degradation from plasma processing

Interface states in SiO2, plasma process induced

Oxide and interface damage by plasma processing

Oxide defect density errors with large area test capacitors

Oxide reliability, thermal SiO2, plasma process charging effects

Plasma damage, thermal SiO2, anneal effects

Plasma damage, thermal SiO2, capacitor area effects

Plasma damage, thermal SiO2, oxide thickness effects

Plasma damage, thermal SiO2, plasma turn-on/off effects

Plasma process induced latent damage

Plasma processes act like constant current sources

93280

by: Monsérié, C., Papadas, C., SGS-THOMSON Microelectronics, Ghibaudo, G., UA-CNRS, Gounelle, G., Mortini, P., SGS-THOMSON Microelectronics, Pananakakis, G., UA-CNRS

title: Correlation Between Negative Bulk Oxide Charge and Breakdown, Modeling, and New Criteria for Dielectric Quality Evaluation

Breakdown charge (QBD), thermal SiO2, constant current

Bulk charge generation, thermal SiO2

MOS bulk oxide quality, thermal SiO2

Oxide breakdown activation energies

Oxide breakdown correlation with negative bulk charge

Oxide breakdown qualitative model

Oxide degradation at weak points at the injecting interface

Oxide quality criteria

Wearout and breakdown, thermal SiO2 Interface quality states

Wearout and breakdown, thermal SiO2, bulk charge effects

93285

by: Dumin, D.J., Scott, R.S., Subramoniam, R., Clemson University

title: A Model Relating Wearout Induced Physical Changes in Thin Oxides to the Statistical Description of Breakdown

Bulk charge generation, thermal SiO2

MOS capacitance-voltage (CV) measurement

MOS current-voltage (IV) measurement

MOS transient current-time (IT) measurement

Oxide breakdown model related to physical wearout

Oxide wearout model and characterization

TDDB distributions generated by statistical model

TDDB, distribution, Weibull, simulation

Trap discharge, SiO2, tunneling front model

Trap generation, thermal SiO2, fluence effects

Trap generation, thermal SiO2, polarity effects

Trap generation, thermal SiO2, time effects

Trap generation, thermal SiO2,voltage effects

Wearout and breakdown, thermal SiO2,

93293

by: Rakkhit, R., Heiler, F.P., Fang, P., Sander, C., Advanced Micro Devices

title: Process Induced Oxide Damage and Its Implications to Device Reliability of Submicron Transistors

Capacitor, MOS, antenna

Gate oxide degradation of transistors by plasma based processing

Gate oxide deterioration source and cumulative effects

Oxide damage, thermal SiO2, plasma induced

Oxide damage, thermal SiO2, process induced

Oxide reliability, thermal SiO2, process effects

Transistor gate oxide damage assessment with antenna structures

Transistor hot-carrier performance versus interconnect antenna

93297

by: Oates, A.S., AT&T Bell Laboratories

title: Electromigration in Stress-Voided Al Alloy Conductors

Effects of stress voiding on electromigration life

Electromigration failure model for stripes with stress voids

Electromigration, in stress voided metal, MTF dependence on current density

Electromigration, in stress voided metal, MTF dependence on void size

Electromigration, in stress voided metal, SEM observations of failure sites

Electromigration, in stress voided metal, failure distributions for

Electromigration, in stress voided metal, modeling failure probability

Electromigration, in stress voided metal, reliability

Electromigration, in stress voided metal, role of stress gradients in failure

Electromigration, in stress voided metal, void density effects

Reliability of stress voided conductors

Slit voids, nucleation at stress voids during electromigration

Stress voids in Al alloy conductors

Stress voids, acceleration conditions

Stress voids, influence electromigration

93304

by: Dreyer, M.L., Fu, K.Y., Varker, C.J., Motorola Inc.

title: The Effects of Temperature and Microstructure on the Components of Electromigration Mass Transport

Effects of linewidth on electromigration activation energy

Effects of linewidth on median lifetime

Electromigration failure model for narrow lines

Grain boundary and lattice mass transport model for electromigration

93311

by: Ting, L.M., May, J.S., Hunter, W.R., McPherson, J.W., Texas Instruments, Inc.

title: AC Electromigration Characterization and Modeling of Multilayered Interconnects

AC electromigration at 2MHz

AC electromigration characteristics

AC electromigration failure under repetitive dual-pulse

Average current recovery model

Current wave form

Model for AC electromigration failure in W/AlSiCu lines

93317

by: Hinode, K., Furusawa, T., Homma, Y., Hitachi, Ltd.

title: Dependence of Electromigration Lifetime on the Square of Current Density

Current dependence model for electromigration failure

Dependence of number of voids and hillocks on current density

Dependence of void growth rate on current density

93327

by: Griffin, Jr., A.J., Hernandez, S.E., Brotzen, F.R., Rice University, Lawrence, J.D., McPherson, J.W., Dunn, C.F., Texas Instruments, Inc.

title: Corrosion Behavior of Thin-Film Metallizations on CVD W and Sputtered W-Ti Barrier Layers

Corrosion behavior of Al and Al alloy films on CVD tungsten

DC polarization testing for thin film corrosion

Immersion testing for thin-film corrosion

93334

by: Saito, T., Aoki, H., Tamaru, T., Owada, N., Hitachi, Ltd.

title: Reliability Improvement in Blanket Tungsten CVD Contact Filling Process for High Aspect Ratio Contact

Contact open failure

Failure prevention in submicron contacts

Failures in CVD Tungsten filled contacts

Failures in high aspect ratio contacts

Failures in submicron contacts with aspect ratio of 2

93340

by: Shibata, H., Matsuno, T., Hashimoto, K., Toshiba Corporation

title: Via Hole-Related Simultaneous Stress-Induced Extrusion and Void Formation in Al Interconnects

Annealing-induced Al extrusion in vias holes

Failure mechanism in tungsten filled via

Stress-induced extrusion in Al interconnects

Stress-induced failure in Al interconnects

Via failure due to 450°C annealing

93345

by: Dreike, P.L., Barton, D.L., Sandoval, C.E., Sandia National Laboratories

title: Analysis of Parametric Drift of a MESFET-Based GaAs MMIC Due to 125°C Storage

Aging study of GaAs MESFET MMICs

Electromigration, accelerated tests, extrapolating for narrow linewidth

Electromigration, data supporting linewidth-dependent activation energy

Electromigration, data supporting linewidth-dependent failure time

Electromigration, failure of Black's equation for narrow linewidths

Electromigration, importance of lattice diffusion

Electromigration, microstructural effects on

Electromigration, modeling contributions from lattice and grain boundaries

Electromigration, modeling linewidth dependence of activation energy

Electromigration, modeling linewidth dependence of failure time

Electromigration, modeling mass transport in

Failure Analysis of GaAs MESFET based VVA MMICs

Microwave attenuation in GaAs MESFET based VVA MMICs

93352

by: Ragle, D., Decker, K., Loy, M., Texas Instruments, Inc.

title: ESD Effects on GaAs MESFET Lifetime

ESD, GaAs MMICs

GaAs MESFETs, Noncatastrophic ESD damage

93357

by: Weatherford, T.R., McMorrow, D., Curtice, W.R., Campbell, A.B., Knudson, A.R., Naval Research Laboratory

title: Examination of the SEU Sensitivity of GaAs MESFETs via 2-D Computer Simulation and Picosecond Charge Collection Experiments

Computer simulation of charge collection in GaAs MESFETs

Electromigration, AC, Average current recovery model

Electromigration, AC, MTF dependence on duty's cycle

Electromigration, AC, data at 2 MHz

Electromigration, AC, experimental comparison with DC and pulsed DC

Electromigration, AC, lifetime data for multilayer interconnects

Electromigration, AC, methodology for design guidelines

Electromigration, AC, modeling, comparison with vacancy relaxation model

Electromigration, AC, modeling, damage recovery

Electromigration, AC, modeling, improvement of average current model

Electromigration, AC, multilayer interconnects

Electromigration, AC, testing characterization of thermal transients

Electromigration, AC, testing using general AC waveform

Enhanced charge-collection in GaAs MESFETs

GaAs MESFETs, 2-D carrier transport code

GaAs MESFETs, 2-D electron temperature model

GaAs MESFETs, collection of SEU charge

GaAs MESFETs, electron and hole densities

Indium Phosphide (InP) HEMTs, life test results

SEU in GaAs MESFETs, enhanced charge collection

Single event upset (SEU) effects, GaAs MESFETs

93364

by: LaCombe, D.J., Hu, W.W., Bardsley, F.R., General Electric Company

title: Reliability of 0.1 µm InP HEMTs

Accelerated testing, GaAs HEMTs

Black's relation, current density model, contrast with Joule heating model

Black's relation, current density model, contrast with incubation time model

Black's relation, current density model, contrast with threshold model

Black's relation, lifetime dependence on square of current density explained

Black's relation, numerical simulations of current density exponent

Distributed stress life test, GaAs HEMTs

Electromigration, data on interval distributions of voids and hillocks

Electromigration, data on void size distributions vs. current density

Electromigration, void density, constancy of during conductor life

Electromigration, void density, linear dependence on current density

Electromigration, void growth rate, linear dependence on current density

Performance and reliability, InP HEMTs

93372

by: Pereira, J.S., Shieh, P.J., Gobbi, A.L., Sato, E., Malberti, P., Santos, T., Borin, F., Patel, N., Telebras

title: Reliability of InGaAs/InP Photodiodes Passivated with Polyimide

Corrosion, Al/alloy metallizations, effects of barrier layers

Corrosion, galvanic series for thin film metallizations

Corrosion, metallizations behavior explained in terms of galvanic couples

Corrosion, metallizations effects of surface roughness of barrier layers on

Corrosion, metallizations, DC polarization measurement technique

Corrosion, metallizations, effects of sputtered vs. CVD barrier layers on

Corrosion, metallizations, galvanic couples between Al and barrier layers

Corrosion, metallizations, immersion tests of

Corrosion, relative rates of, for Al/alloys on barrier layers

Dark current, failure of photodiodes

Photodiodes

Reliability of InGaAs/InP mesa photodiodes

Structure, fabrication and characteristics of InGaAs/InP mesa

93375

by: Halkias, G., Christou, A., Huang, K., Li, J., University of Maryland, Papanicolaou, N., Naval Research Laboratory

title: Surface Related Failure Mechanisms in Polyimide Passivated L-Band MMICs

Contacts, blanket tungsten, H annealing process to suppress open failure

Contacts, blanket tungsten, H reduction CVD W process to suppress open failure

Contacts, blanket tungsten, comparison of silane and H-reduction nucleation

Contacts, blanket tungsten, corrosion of Si interface during filling

Contacts, blanket tungsten, open failure SEM observations of

Contacts, blanket tungsten, open failure, activation energy of

Contacts, blanket tungsten, reliability vs thermal stressing

Contacts, filling by blanket tungsten, CVD process

Contacts, submicron, high aspect ratio

Electromigration at GaAs-Polyimide interface of MMICs

GaAs MMICs, polymide passivation, defects in and caused by

GaAs MMICs, polymide passivation, life test results

Gate leakage at GaAs-Polyimide interface, MMICs

Monte carlo, MMIC reliability

Polymide passivated GaAs MMICs

93380

by: Montangero, P., Azzini, G.A., Libratore, M., Mancini, M., Pederzini, E., Serra, L., CSELT

title: A SOM Approach to the Failure Physics of Optoelectronic Devices

Laser diodes, failed due to dislocations

Optical beam induced current (OBIC) applied to laser diodes

Photo luminescence (PL) applied to laser diodes

SOM, III-V material analysis

SOM, OBIC and PL, analysis of laser diodes

SOM, failure analysis of AlGaAs/GaAs laser diodes

Scanning optical microscopy applied to laser diodes

Stress voiding, near vias

Vias stress void failure, mechanism of void formation

Vias stress void failure, modeling of stress distribution and Al displacement

Vias stress void failure, observations by opitical, T-W, and SEM techniques

Vias, failure by void formation and Al extrusion

Vias, influence of high temperature anneal on reliability of Al lines with vias

Vias, reliability data vs. anneal conditions determined by accelerated testing

Vias, stress void failure, effect of via-via separation on

Vias, stress void failure, failure analysis methodology

Vias, stress void failure, influence of anneal time and temperature on